Materials and Failures in MEMS and NEMS
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Omtale
The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process.
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Utgivelsesdato:
28.09.2015
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ISBN/Varenr:
9781119083603
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Språk:
, Engelsk
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Forlag:
Wiley-Scrivener
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Fagtema:
Teknologi, ingeniørfag, landbruk og industri
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Litteraturtype:
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Sider:
432
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Høyde:
26.2 cm
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Bredde:
18.5 cm