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Advanced Interconnects for ULSI Technology

Zschech, Ehrenfried Ho, Paul S. Baklanov, Mikhail

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Leveringstid: 7-30 dager

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Omtale

Advanced Interconnects for ULSI Technology is dedicated to the materials and methods which might be suitable replacements. It covers a broad range of topics, from physical principles to design, fabrication, characterization, and application of new materials for nano-interconnects.

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